|
Automatic sputter coater
|
|
|
Chamber size
|
|
120mm Ø x 120mm high
(4.75" x 4.75")
|
|
Sputter head
|
|
Low voltage planar magnatron
Quick target change
Wrap-around dark-space shield
|
|
Sputter target
|
|
Gold fitted as standard
(Au/Pd or Pt optional)
57mm Ø x 0.1mm thick
|
|
Sputter supply
|
|
Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30 or 40mA)
|
|
Sample table
|
|
Holds 12 SEM ½" stubs
Height adjustment through 60mm
|
|
Analogue metering
|
|
Vacuum, Atm - 0.001mb
Current, 0 - 50mA
|
|
Control method
|
|
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer, 5 - 300 seconds with pause
Automatic vent
|
|
Thickness monitoring
|
|
Optional, MTM-10
|
|
Thickness control
|
|
Optional, MTM-20 with termination facility
|
|
Dimensions
|
|
Width 420mm (16.5"), Depth 295mm (11.6"),
Height 287mm (11.3")
|
|
Weight
|
|
11Kg (24.3 lbs)
|
|
Power
|
|
45 VA max (excluding rotary pump)
|
|
Pumping system
|
|
|
Rotary Pump
|
|
High speed, direct drive 2-stage
|
|
Pumping speed
|
|
3.0/3.6 m3/hr (50/60Hz)
Pumpdown time to 0.1mb is 20/25 sec.
|
|
Desktop system
|
|
Vacuum pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
|
|
Dimensions
|
|
Width 330mm (13.0"), Depth 215mm (8.5"),
Height 210mm (8.3"), 270mm (10.6") with filter
|
|
Weight
|
|
15Kg (33.2 lbs)
|
|
Power
|
|
130 VA
|
|
Services required
|
|
|
Supply
|
|
100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
|
|
Power
|
|
175 VA max.
|
|
Argon gas
|
|
Purity, min. 99.9%
Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
Hose connection, 6.0mm (¼")
|