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Automatic sputter coater
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Chamber size
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150mm Ø (5.9")
Variable height, 165mm - 250mm (6.5" - 9.8")
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Sputter head
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Low voltage planar magnatron
Quick target change
Wrap-around dark-space shield
Target shutter
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Sputter target
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Gold fitted as standard
(Au/Pd or Pt optional)
57mm Ø x 0.1mm thick
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Sputter supply
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Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30 or 40mA)
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Sample table
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Holds 12 SEM ½" stubs
Height adjustment through 60mm
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Analogue metering
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Vacuum, Atm - 0.001mb
Current, 0 - 50mA
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Control method
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Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer, 5 - 300 seconds with pause
Automatic vent
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Thickness monitoring
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Optional, MTM-10
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Thickness control
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Optional, MTM-20 with termination facility
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Dimensions
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Width 420mm (16.5"), Depth 295mm (11.6"),
Height 332mm (13.1")
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Weight
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13Kg (28.7 lbs)
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Power
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45 VA max (excluding rotary pump)
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Pumping system
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Rotary Pump
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High speed, direct drive 2-stage
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Pumping speed
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3.0/3.6 m3/hr (50/60Hz)
Pumpdown time to 0.1mb is 20/25 sec.
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Desktop system
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Vacuum pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
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Dimensions
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Width 330mm (13.0"), Depth 215mm (8.5"),
Height 210mm (8.3"), 270mm (10.6") with filter
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Weight
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15Kg (33.2 lbs)
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Power
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130 VA
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Services required
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Supply
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100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
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Power
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175 VA max.
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Argon gas
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Purity, min. 99.9%
Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
Hose connection, 6.0mm (¼")
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