Cressington 108auto/SE

Automatic sputter coater
Chamber size
150mm Ø (5.9")
Variable height, 165mm - 250mm (6.5" - 9.8")
Sputter head
Low voltage planar magnatron
Quick target change
Wrap-around dark-space shield
Target shutter
Sputter target
Gold fitted as standard
(Au/Pd or Pt optional)
57mm Ø x 0.1mm thick
Sputter supply
Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30 or 40mA)
Sample table
Holds 12 SEM ½" stubs
Height adjustment through 60mm
Analogue metering
Vacuum, Atm - 0.001mb
Current, 0 - 50mA
Control method
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer, 5 - 300 seconds with pause
Automatic vent
Thickness monitoring
Optional, MTM-10
Thickness control
Optional, MTM-20 with termination facility
Width 420mm (16.5"), Depth 295mm (11.6"),
Height 332mm (13.1")
13Kg (28.7 lbs)
45 VA max (excluding rotary pump)
Pumping system
Rotary Pump
High speed, direct drive 2-stage
Pumping speed
3.0/3.6 m3/hr (50/60Hz)
Pumpdown time to 0.1mb is 20/25 sec.
Desktop system
Vacuum pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
Width 330mm (13.0"), Depth 215mm (8.5"),
Height 210mm (8.3"), 270mm (10.6") with filter
15Kg (33.2 lbs)
130 VA
Services required
100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
175 VA max.
Argon gas
Purity, min. 99.9%
Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
Hose connection, 6.0mm (¼")
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