High vacuum
carbon coater
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Chamber size
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150mm Ø (5.9")
Variable deposition height, 165mm - 250mm (6.5" - 9.8")
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Evaporation source
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Bradley type (Ø6.15mm rods)
Fibre type (0.4g/m to 1.6g/m)
Heavy duty stainless steel construction
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Evaporation supply
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Microprocessor based
Feedback loop controlled with remote current/voltage sensing
Safety interlocked
Variable, 135A max. with over-current protection
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Sample stage
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Static table holds 12 SEM ½" stubs
Height adjustment through 60mm
Optional rotary-planetary-tilt stage
(view photo)
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Analogue metering
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| Vacuum, dual range |
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Atm - 0.001 mbar |
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1x10-3 mbar - 5x10-6 mbar |
| Current, 0 - 200A |
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Control method
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Automatic evaporation control using programmed voltage and timer
Full manual override with pulsed or continuous operation
Digital timer setting, 0.1 - 9.9 seconds (max 25 seconds)
Digital voltage setting, 0.1 - 5.5V
Automatic vent
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Thickness monitoring
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Optional, MTM-10 only
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Weight
(approx)
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25kg (55 lbs)
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Pumping system
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Configuration
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Turbo/Rotary pump combination
Optional turbo/diaphragm pump combination (208CD)
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Pumping speed
(approx)
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80 litres/sec
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Pumpdown time
(approx)
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1.5 min. to 1x10-4 mbar
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Ultimate pressure
(approx)
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5x10-6 mbar
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Desktop system
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Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
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Weight
(approx)
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20kg (44 lbs)
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Thickness monitor
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MTM-10
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Microprocessor based
4 digit display with push button zero
5 times/sec. display update rate
6 MHz crystal with life-time check
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Thickness range
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0 - 999.9nm
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Resolution
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0.1nm
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Density range
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0.50 - 30.00gm/cm3
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Tooling factor range
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0.25 - 8.00
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Services required
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Supply
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100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
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System dimensions
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Size
(approx)
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Width 600mm (23.6"), Depth 600mm (23.6"),
Height 360mm (14.2")
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