High resolution
sputter coater
|
|
|
Chamber size
|
|
150mm Ø (5.9")
Variable height, 165mm - 250mm (6.5" - 9.8")
|
|
Sputter head
|
|
Low voltage planar magnatron
Quick target change
Wrap-around dark-space shield
Shutter for target conditioning
|
|
Sputter target
|
|
Cr, Pt/Pd as standard
(Ta, Au, Au/Pd, Pt or W optional)
|
|
Sputter supply
|
|
Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (20, 40, 60 or 80mA)
|
|
Sample stage
|
|
Non-repetitive rotary planetary motion with manual tilt 0 - 90°
Variable speed rotation
Crystal head
4 sample holders
(click to view photo)
|
|
Analogue metering
|
|
Vacuum, Atm - 0.001mb
Current, 0 - 100mA
|
|
Control method
|
|
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer, 5 - 300 seconds with pause
Automatic vent
|
|
Thickness control
|
|
MTM-20 with termination facility
|
|
Pumping system
|
|
|
Configuration
|
|
Turbo-drag/rotary pump combination
Optional diaphragm pump instead of rotary pump
|
|
Pumping speed
|
|
300 litres/min @ 0.1mb
|
|
Pumpdown time
|
|
1 min. to 1x10-3mb
(1.5 min. with diaphragm pump option)
|
|
Ultimate pressure
|
|
1x10-5mb
|
|
Desktop system
|
|
Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
|
|
Thickness monitor
|
|
|
MTM-20
|
|
Microprocessor based
4 digit display with push button zero
5 times/sec. display update rate
6 MHz crystal with life-time check
|
|
Thickness range
|
|
0 - 999.9nm
|
|
Resolution
|
|
Better than 0.1nm
|
|
Density range
|
|
0.50 - 30.00gm/cm3
|
|
Tooling factor range
|
|
0.25 - 8.00
|
|
Termination range
|
|
0 - 999.9nm
|
|
Services required
|
|
|
Supply
|
|
100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
|
|
Power
|
|
550 VA max.
|
|
Argon gas
|
|
Purity, min. 99.9%
Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
Hose connection, 6.0mm (¼")
|
|
System dimensions
|
|
|
Size
|
|
Width 600mm (23.6"), Depth 600mm (23.6"),
Height 450mm (17.7")
|
|
Weight
|
|
40Kg (88.5 lbs)
|