Cressington 208HR

High resolution
sputter coater

Chamber size
150mm Ø (5.9")
Variable height, 165mm - 250mm (6.5" - 9.8")
Sputter head
Low voltage planar magnatron
Quick target change
Wrap-around dark-space shield
Shutter for target conditioning
Sputter target
Cr, Pt/Pd as standard
(Ta, Au, Au/Pd, Pt or W optional)
Sputter supply
Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (20, 40, 60 or 80mA)
Sample stage
Non-repetitive rotary planetary motion with manual tilt 0 - 90°
Variable speed rotation
Crystal head
4 sample holders
(click to view photo)
Analogue metering
Vacuum, Atm - 0.001mb
Current, 0 - 100mA
Control method
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer, 5 - 300 seconds with pause
Automatic vent
Thickness control
MTM-20 with termination facility
Pumping system
Turbo-drag/rotary pump combination
Optional diaphragm pump instead of rotary pump
Pumping speed
300 litres/min @ 0.1mb
Pumpdown time
1 min. to 1x10-3mb
(1.5 min. with diaphragm pump option)
Ultimate pressure
Desktop system
Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
Thickness monitor
Microprocessor based
4 digit display with push button zero
5 times/sec. display update rate
6 MHz crystal with life-time check
Thickness range
0 - 999.9nm
Better than 0.1nm
Density range
0.50 - 30.00gm/cm3
Tooling factor range
0.25 - 8.00
Termination range
0 - 999.9nm
Services required
100 - 120 or 200 - 240 VAC, 50/60Hz
(specify on order)
550 VA max.
Argon gas
Purity, min. 99.9%
Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
Hose connection, 6.0mm (¼")
System dimensions
Width 600mm (23.6"), Depth 600mm (23.6"),
Height 450mm (17.7")
40Kg (88.5 lbs)
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